Trisilylamine msds 5 million safety data sheets available online, brought to you by 3E. - Find MSDS or SDS, a COA, data sheets and more information. 65% 规格：公斤级 [Trisilylamine]化源网提供TrisilylamineCAS号13862-16-3，TrisilylamineMSDS及其说明、性质、英文名、生产厂家、作用/用途、分子量、密度 Trisilylamine Synonyms: Trisilylamine; 2-Silylpropanedisilazane; Trissilylamine CAS: MF: H9NSi3 MW: 107. Safety Data Sheet SIT8709. If you would like your company's precursor products listed, or your existing listing changed or removed, send me an email. Voltaix™ brand gases represent the culmination of many years of development that leveraged world-class expertise in silicon, germanium and boron chemistry applied to advanced semiconductor processes. 33466,MSDS. 0 Jan 10, 2014 · Prepared by safety and environmental affairs MSDS ISSUE DATE SIT8715. 온라인 구매 지원. It is a colorless liquid with an ammonia-like odor. pro Trisilylamine has 1 similiar compounds, including Trisilylamine (13862-16-3), providing their MSDS, density, melting point, boiling point, structure, formula, mo Nov 4, 2025 · chemical compound Trisilylamine (CAS 13862-16-3), also known as octamethoxy-trisiloxane, is a high-purity organosilicon compound widely used in advanced material synthesis. Advice for firefighters : Highly flammable liquid and vapour. Reactivity See Nov 14, 2025 · ChemicalBook 提供有关13862-16-3的理化性质,用途,制备方法,CAS号,MSDS Substances Substance type : Mono-constituent Name : TRISILYLAMINE CAS-No. 7,192,626 to Dussarrat et al. CAS：13862-16-3 产品牌号：99. Full contact Material: Nitrile 化学物質「トリシリルアミン」の詳細情報です。J-GLOBAL 科学技術総合リンクセンターは、国立研究開発法人科学技術振興機構（JST）が運営する、無料で研究者、文献、特許などの科学技術・医学薬学等の二次情報を閲覧できる検索サービスです。検索結果からJST内外の良質な一次情報等へ案内し Triethylamine for synthesis. No. Gaschem manufactures and sells this product in small and bulk volumes. Uses advised against : The product is being supplied under the TSCA R&D Exemption (40 CFR Section 720. Irritating fumes and organic acid vapors may develop when material is exposed to elevated temperatures or open flame. 0 ChemicalBook 致力于为化学行业用户提供Trisilylamine的性质、化学式、分子式、比重、密度,同时也包括Trisilylamine的沸点、熔点、MSDS、用途、作用、毒性、价格、生产厂家、用途、上游原料、下游产品等信息。 Disclaimer The information provided in this Safety Data Sheet is correct to the best of our knowledge, information and belief at the date of its publication. was established in March 2011. 65% 应用：通过流动化学气相沉积（FCVD）形成氧化硅 运输信息：UN 编号 1993, Class 3, PG II 储藏：保持容器密闭，存放在干燥、通风良好的地方。 May cause respiratory irritation. : Danger : H225 - Highly flammable liquid and vapor H260 - In contact with water releases flammable gases which may ignite spontaneously Precautionary statements (GHS US) H314 - Causes severe skin burns and eye damage H318 - Causes serious eye damage H330 - Fatal if inhaled H335 - May cause respiratory irritation : P210 - Keep away from heat, open flames, sparks. : May form flammable/explosive vapour-air mixture. It is multifunctional, featuring a tertiary amine and three alkene groups. 1. Trisilylamine [N (SiH)], CAS# 13862-16-3 Where to buy www. : Remove person to fresh air and keep comfortable for breathing. SAFETY DATA SHEET Version 6. Disclaimer The information provided in this Safety Data Sheet is correct to the best of our knowledge, information and belief at the date of its publication. Electronics Specialty Materials , like Excimer Gases, Heliu Uses advised against : The product is being supplied under the TSCA R&D Exemption (40 CFR Section 720. . We are committed to developing industry-leading organometallic product technology. P223 - Do not Trisilylamine에 대한 모든 정보는 Chemicalbook 에서 조회 할 수 있습니다. Free access to more than 4. As a science-driven company, we reach out to the world’s best semiconductor companies to unlock the potential for cutting-edge microchip architectures and electronics. Keep out of reach of children. 3 Details of the supplier of the safety data sheet Voltaix™ is Air Liquide Advanced Materials’ brand of gaseous precursors that enhance the performance of logic, memory, solar, and display devices. Mar 2, 2025 · N,N-disilyl-Silanamine (Trisilylamine) CAS:13862-16-3 is a versatile organosilicon compound used in the synthesis of silicon-containing materials and semiconductor applications. 36). It is the recipient’s responsibility to comply with the requirements of the R&D exemption. 6 ° C and a boiling point of +52 ° C. Triallylamine (and mono- and diallyl amines) is produced by the treating allyl chloride with ammonia. 3 Details of the supplier of the safety data sheet Trisilylamine Application:Trisilylamine Established in 2010, located in Hangzhou Qinglan science park, lingruichem is a technical company mainly focus on the Custom synthesis, manufacturing, sales of chemicals to various Corrosive to respiratory tract. 中文名:Trisilylamine,英文名:Trisilylamine,CAS:,化学式:H9NSi3,分子量:107. MyChemicals Build a list of chemicals. The information relates only to the Uses advised against : The product is being supplied under the TSCA R&D Exemption (40 CFR Section 720. If a link goes bad, let us know. S. 2. No REACH Annex XVII restrictions TRISILYLAMINE is not on the REACH Candidate List TRISILYLAMINE is not on the REACH Annex XIV List TRISILYLAMINE is not subject to Regulation (EU) No 649/2012 of the European Parliament and of the Council of 4 july 2012 concerning the export and import of hazardous chemicals. 6 Date of issue: 01/13/2015 Version: 1. [3] ChemicalBook Provide TrisilylamineMelting Point Boiling Point Density,Trisilylamine CAS Chemical Properties MSDS. Browse Reviews, Pics & Videos for Call Girls & Massage. KCL GmbH, D-36124 Eichenzell, Internet: www. 8 Date of issue: 02/23/2016 Version: 1. 8: 1/10/14 SUPERSEDES: none The information contained in this document has been gathered from reference materials and/or Gelest, Inc. ChemSpider record containing structure, synonyms, properties, vendors and database links for trisilylamine, 13862-16-3, VOSJXMPCFODQAR-UHFFFAOYSA-N PentaPro Materials Inc. 6 : 采用吸收材料收集液体泄漏 如果化学品流入下水道或者公共水域,通知相关部门处置化学品、 固废依据地方/ 区域/ 国家/国际规定 三 (三甲基矽基)胺和 三氯化銻 反應，幾乎可以在-60 °C下形成氮化銻 類立方烷簇合物。 [14] 在 P 4 - t -Bu 和三 (三甲基矽基)胺存在下，酮可以在溫和條件下 三氟甲基化。使用惰性的 三氟甲烷 （HCF 3，HFC-23）三氟甲基化，產率高達84%。 [15] 單體 三氯 (三甲基矽基)磷氮烯 Cl 3 P=NSiMe 3 可以由三 (三甲基矽 Trimethylsilylamine (chemical formula N(SiH3)3, referred to as TSA), is a colorless, easily hydrolyzed liquid with good fluidity. ChemicalBook 致力于为化学行业用户提供N,N-二硅烷基-硅烷胺的性质、化学式、分子式、比重、密度,同时也包括N,N-二硅烷基-硅烷胺的沸点、熔点、MSDS、用途、作用、毒性、价格、生产厂家、用途、上游原料、下游产品等信息。 SDS management, distribution & revision solutions - for every budget. Pat. First-aid measures after ingestion : First aider: Pay attention to self-protection. If Aug 25, 2025 · Chemsrc provides Trisilylamine (CAS#:13862-16-3) MSDS, density, melting point, boiling point, structure, formula, molecular weight etc. Jun 11, 2024 · TSA主要用于在先进逻辑技术节点及3D NAND位元线主要氧化物填充，它使用流动式化学气相沉积（FCVD）机台来将硅电介质沉积到浅沟槽隔离技术（STI）中。由于3D NAND在存储层中的堆叠层增长，从而增加存储孔的高度，因此对TSA用量也持续增长。 Trisilylamine information, including chemical properties, structure, melting point, boiling point, density, formula, molecular weight, uses, prices, suppliers, SDS Trisilylamine MSDS ID Si110 Manufacturer Calgaz A Division of Air Liquide Product code 300108 Revision date 2019 February 25 Language English Trisilylamine (TSA) is a precursor used in semiconductor processing for deposition of silicon nitride, silicon oxynitride and silicon oxide films. Induce artificial respiration with mask fitted with one-way valve or other suitable device but not mouth-to-mouth. Use equipment rated for cylinder pressure. plasma-ald. 3 Details of the supplier of the safety data sheet 5. accurate and reliable. , U. Skin protection This recommendation applies only to the product stated in the safety data sheet, supplied by us and for the designated use. 7 Revision Date 09/08/2024 Print Date 09/09/2024 Triallylamine is the organic compound with the formula N (CH 2 CH=CH 2) 3. 33466 EINECS: Product Categories: Mol File: Mol File Trisilylamine Chemical Properties Safety Information MSDS Information Trisilylamine Usage And Synthesis Trisilylamine Preparation Products And Raw materials Tag:Trisilylamine Related 5. When dissolving in or mixing with other substances and under conditions deviating from those stated in EN 16523-1 please contact the supplier of CE-approved gloves (e. CAS 121-44-8, EC Number 204-469-4, chemical formula (C₂H₅)₃N. kcl. DOCK is the new generation of manufacturers for ultra-high purity compounds. The information relates only to the 三硅基氮 Trisilylamine ALC-SDS-P069 Ver. In contact with water releases flammable gases which may ignite spontaneously. de). SDS management, distribution & revision solutions - for every budget. Never give anything by mouth to an unconscious person. These links are provided for the benefit of our users. TRISILYLAMINE Safety Data Sheet SIT8715. If medical advice is needed, have product container or label at hand. 포함:구조식 이미지,카스 번호 (CAS),분자식,녹는점,끓는 점,밀도,가격,공급자,MSDS (SDS),GHS,사용,독성,HS세관 코드. Make your vision a reality. This document details its chemical properties, industrial applications, quality standards, and safe handling protocols. Call a physician immediately. lookchem Also offer free database of Trisilylamine(13862-16-3) including Basic information, Chemical Property, Safety Information, Msds, Uses, Suppliers, Synthetic Route, Refernces and Doi Number etc. It has a melting point of -105. 3. See, e. Search Find response information for thousands of hazardous materials, including fire and explosion hazards, health hazards, firefighting techniques, cleanup procedures, protective clothing, and chemical properties. Gas cylinder, tonner, Stainless steel drums, ampules, bottles or metal ampules or bubblers are available for packaging. 3 Details of the supplier of the safety data sheet Trisilylamine (13862-16-3) Listed on KECL/KECI (Korean Existing Chemicals Inventory) Listed on the TCSI (Taiwan Chemical Substance Inventory) Trisilylamine | H9NSi3 | CID 139631 - structure, chemical names, physical and chemical properties, classification, patents, literature, biological activities, safety/hazards/toxicity information, supplier lists, and more. The information given is designed only as a guidance for safe handling, use, processing, storage, transportation, disposal and release and is not to be considered a warranty or quality specification. However, NIST makes no warranties to that effect, and NIST shall not be SAFETY DATA SHEET Version 6. test data and is to the best knowledge and belief of Gelest, Inc. When technology requires peak performance in tight spaces, innovative partners are essential. Articles of Trisilylamine are included as well. g. com does not endorse any chemical suppliers. where to buy Trisilylamine(13862-16-3). Close valve after each use and when empty. Use a back flow Find quality suppliers and manufacturers of Trisilylamine for price inquiry. Liquid generates strong static charge when poured. For additional analytical information or details about purchasing contact us at info@gaschem. : 13862-16-3 Full text of hazard classes and H-statements : see section 16 3. : Read and follow all Safety Data Sheets (SDS’S) before use. NEW POSTS BY THE MINUTE. Do not open valve until connected to equipment prepared for use. Give artificial respiration if necessary. - No smoking. 3 Revision Date 09/07/2024 Print Date 09/08/2024 三甲基矽烷 或 三甲基矽化氫，是一種 有機矽化合物，化學式為C 3 H 10 Si，結構簡式 (CH 3) 3 SiH。它是一種極易燃的物質。三甲基矽烷用於 半導體 工業中的電漿相腐蝕劑。 [1] Uses advised against : The product is being supplied under the TSCA R&D Exemption (40 CFR Section 720. Read label before use. For example, substances involved in an incident response (such as a train derailment) or chemicals stored in your community. The product may not be used for a non-exempt commercial purpose under TSCA unless appropriate consent is granted in writing by MilliporeSigma. Use a back flow 三甲硅烷基胺产品说明 1、产品介绍 中文名称:三甲硅烷基胺 英文名称:Trisilylamine(简称TSA) 分子式:(SiH3)3N WO2017106625A1 * 2015-12-18 2017-06-22 Dow Corning Corporation High purity trisilylamine, methods of making, and use JP6475388B1 * 2018-07-18 2019-02-27 信越化学工業株式会社 ポリシラザン含有組成物 KR102435330B1 * 2020-08-21 2022-08-23 에스케이스페셜티 주식회사 트리실릴아민의 제조 장치 및 제조 방법 Search our databases for all Air Liquide and Airgas Safety Data Sheets 中文名：三甲硅烷基胺 英文名：Trisilylamine CAS号：13862-16-3 用途：通过流动化学气相沉积（FCVD）形成氧化硅 纯度指标：99. Notes Go To: Top Data from NIST Standard Reference Database 69: NIST Chemistry WebBook The National Institute of Standards and Technology (NIST) uses its best efforts to deliver a high quality copy of the Database and to verify that the data contained therein have been selected on the basis of sound scientific judgment. [2] Allylamines have particularly weak α-CH bonds, being near 80 kcal/mol.